MD simulation of dislocation mobility during cutting with diamond tip on silicon
نویسندگان
چکیده
منابع مشابه
Molecular dynamics simulation investigation on the plastic flow behaviour of silicon during nanometric cutting
Molecular dynamics simulation (MDS) was carried out using two types of interatomic potential function (a modified version of the Tersoff potential and an analytical bond order potential (ABOP)) to acquire an in-depth understanding of the material flow behaviour of single crystal silicon during nanometric cutting on three principal crystallographic planes and at different cutting temperatures. T...
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ژورنال
عنوان ژورنال: Materials Science in Semiconductor Processing
سال: 2007
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2008.03.004